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Soitec and SEZ Collaborate to Speed Industrialization of sSOI |
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Joint effort focuses on perfecting the wet-etch process used to optimize and speed germanium removal during sSOI volume production
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Soitec and SEZ have initiated
a joint development program
intended to speed the
industrialization of next-generation
strained silicon-on-insulator (sSOI)
substrates. The goal is to develop
new wet-etch processes designed to optimize total germanium removal
in sSOI manufacturing. In the sSOI
Smart Cut™ process, selectively
etching off the germanium template,
which is used only to induce the
“strain” in the active silicon layer,
is a critical step.
Soitec and SEZ will work together
to optimize quality, throughput and
cost of ownership, creating a
reproducible process that can
potentially be used to manufacture
other complex materials.
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