Photoreflectance: Promising Metrology on sSOI
Posted by Dr. Patrick KELLY (Optical Metrology Innovations) on July 11, 2006In ASN #5, Design & Manufacturing, In & Around Our Industry
OMI describes a new approach to in-line strained SOI metrology. Strained-SOI (sSOI) requires fast, accurate and non-contact strain metrology. To address new demands in the engineered substrates industry, several techniques compete: Photoreflectance spectroscopy, Raman spectroscopy, x-ray diffraction and optical birefringence. Photoreflectance appears as one of the most promising of these techniques. Biaxial strain in sSOI …
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