ESD Protection for Advanced SOI
Posted by Shuqing (Victor) CAO (GlobalFoundries) on May 4, 2011In ASN #17, Design & Manufacturing, In & Around Our Industry
Tagged with ESD, GlobalFoundries
Deeply scaled PD- and FD-SOI require new approaches to ESD protection. Recent work from Stanford and GlobalFoundries on gate controlled FEDs shows great promise. Technology scaling unfavorably affects the electrostatic discharge (ESD) protection of integrated circuits mainly by reducing MOSFET oxide and junction breakdown voltage, diode current shunting capability, and by increasing the interconnect resistivity. …
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