MEMS in thin film SOI
Posted by Jean-Pierre RASKIN (UC Louvain) on May 27, 2009In Advanced Substrate Corners, ASN #12, Professor's Perspective
Tagged with MEMS, sensors
SOI is major contender for heterogeneous applications. The advantages of SOI technology for building thin film sensors on membranes as well as three-dimensional (3D) surface micromachined sensors and actuators have been demonstrated over these last years. The flatness and robustness of the thin membrane as well as the self-assembling of out-of-plane 3D microstructures rely on …
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