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Researchers from the NIST Center for Nanoscale Science and Technology have developed a nanophotonic motion sensor

Posted on December 4, 2012
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NIST Nanophotonic Motion SensorTaking a new approach to SOI-MEMS, researchers from the NIST Center for Nanoscale Science and Technology have developed a nanophotonic motion sensor.  Enabled by cavity optomechanics, it can measure the mechanical motion between two nanofabricated structures with a precision close to the fundamental limit imposed by quantum mechanics. Fabricated on a silicon chip at low cost, the device provides a model for dramatically improving MEMS-based sensors such as accelerometers, gyroscopes, and cantilevers for atomic force microscopy.