Researchers from the NIST Center for Nanoscale Science and Technology have developed a nanophotonic motion sensorPosted on December 4, 2012
Tagged with apps, embedded, MEMS, NIST, R&D, sensor, silicon-on-insulator
Taking a new approach to SOI-MEMS, researchers from the NIST Center for Nanoscale Science and Technology have developed a nanophotonic motion sensor. Enabled by cavity optomechanics, it can measure the mechanical motion between two nanofabricated structures with a precision close to the fundamental limit imposed by quantum mechanics. Fabricated on a silicon chip at low cost, the device provides a model for dramatically improving MEMS-based sensors such as accelerometers, gyroscopes, and cantilevers for atomic force microscopy.