#12 | SPRING 2009
posted May 27, 2009
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SOI in Action
All of VTI Technologies’ MEMS products are based on SOI wafers. The company’s CMA 3000 multi-axis accelerometer is the “stride sensor chip” in the miCoach real-time training system launched by adidas and Samsung last year. (Courtesy: VTI Technologies, adidas and Samsung)
Feature : SOI MEMS – A Winning Combination
• Manufactured by ST, Debiotech's tiny pump holds big promise for diabetes treatment.
• SiTime's line of ultra-small resonators target portable electronics.
• Gefran's pressure sensors take the heat for plastics manufacturing systems.
For pure-play MEMS leader Silex, SOI offers clear advantages.
Yole says '09 will be a great year for new product introductions.
In & Around Our Industry

• Dr. Nobuyuki Sugii describes advances in Hitachi's thin-BOX work for high-speed, low-power SOCs.
• The Basics: Why is controlling Vth variability so important? Here's an explanation for the layman.
Advanced Substrate Corners
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Thank You !
A special thanks goes to Hitachi, VTI, Debiotech, ST, SiTime, Gefran, Yole, Silex, UCL, CEA-Leti, the SOI Industry Consortium and Soitec for their help with this issue.